Reverse transfer of nanostencil patterns using intermediate sacrificial layer and lift-off process
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 2006
ISSN: 1071-1023
DOI: 10.1116/1.2366610